2,4,6,8-Tetramethylcyclotetrasiloxane
Agent Name
2,4,6,8-Tetramethylcyclotetrasiloxane
Synonyms
Cyclotetrasiloxane, 2,4,6,8-tetramethyl-; [ChemIDplus] ZTOMCATS Precursor; 1,3,5,7, Tetramethylcyclotetrasiloxane; TMCTS; [Air Products MSDS] UN1993
Category
Metalloid Compounds (Silicon)
Description
Colorless liquid with an odor like ether; [Air Products MSDS]
Sources/Uses
Used in semiconductor processing; [Air Products MSDS]
Comments
Decomposed by water (may evolve hydrogen gas); An irritant; Harmful by ingestion and skin absorption; [Air Products MSDS] See "Octamethylcyclotetrasiloxane."
Vapor Pressure
7.02 mm Hg
Explanatory Notes
The Guide in the Emergency Response Guidebook is for "Flammable liquid, n.o.s.'
Processes
Industrial Processes with risk of exposure: