2,4,6,8-Tetramethylcyclotetrasiloxane

Agent Name
2,4,6,8-Tetramethylcyclotetrasiloxane
CAS Number
2370-88-9
Formula
C4-H16-O4-Si4
Major Category
Metals
2,4,6,8-Tetramethylcyclotetrasiloxane formula graphical representation
Synonyms
Cyclotetrasiloxane, 2,4,6,8-tetramethyl-; [ChemIDplus] ZTOMCATS Precursor; 1,3,5,7, Tetramethylcyclotetrasiloxane; TMCTS; [Air Products MSDS] UN1993
Category
Metalloid Compounds (Silicon)
Description
Colorless liquid with an odor like ether; [Air Products MSDS]
Sources/Uses
Used in semiconductor processing; [Air Products MSDS]
Comments
Decomposed by water (may evolve hydrogen gas); An irritant; Harmful by ingestion and skin absorption; [Air Products MSDS] See "Octamethylcyclotetrasiloxane."
Biomedical References

Exposure Assessment

Vapor Pressure
7.02 mm Hg
Explanatory Notes
The Guide in the Emergency Response Guidebook is for "Flammable liquid, n.o.s.'

Diseases, Processes, and Activities Linked to This Agent

Processes

Industrial Processes with risk of exposure: