2,4,6,8-Tetramethylcyclotetrasiloxane

Synonyms

Cyclotetrasiloxane, 2,4,6,8-tetramethyl-; [ChemIDplus] ZTOMCATS Precursor; 1,3,5,7, Tetramethylcyclotetrasiloxane; TMCTS; [Air Products MSDS] UN1993

Category

Metalloid Compounds (Silicon)

Description

Colorless liquid with an odor like ether; [Air Products MSDS]

Sources/Uses

Used in semiconductor processing; [Air Products MSDS]

Comments

Decomposed by water (may evolve hydrogen gas); An irritant; Harmful by ingestion and skin absorption; [Air Products MSDS] See "Octamethylcyclotetrasiloxane."

Biomedical References

7.02 mm Hg

Explanatory Notes

The Guide in the Emergency Response Guidebook is for "Flammable liquid, n.o.s.'

Processes

Industrial Processes with risk of exposure:

• Semiconductor Manufacturing