Hexachlorodisilane

Agent Name
Hexachlorodisilane
CAS Number
13465-77-5
Formula
Cl6-Si2
Major Category
Toxic Gases & Vapors
Hexachlorodisilane formula graphical representation
Synonyms
Disilane, 1,1,1,2,2,2-hexachloro-; Disilane, hexachloro-; [ChemIDplus] Disilane hexachloride; Disilicon hexachloride; 1,1,1,2,2,2-Hexachlorodisilane; Silicon chloride; [Matheson Tri-Gas MSDS] UN2987
Category
Chlorosilanes
Description
Clear to straw-colored liquid with an acrid odor of hydrogen chloride; [Matheson Tri-Gas MSDS]
Sources/Uses
Used in semiconductor processing; [Matheson Tri-Gas MSDS]
Comments
May form explosive byproducts on prolonged storage; May explode on contact with water; Readily hydrolyzes forming hydrochloric acid; Causes burns; Inhalation may cause corrosive injuries to upper respiratory tract and lungs; [Matheson Tri-Gas MSDS]
Biomedical References

Exposure Assessment

TIH
Yes
Dangerous When Wet
Yes
Explanatory Notes
Vapor pressure = 12 mm Hg at 40 deg C; [Matheson Tri-Gas MSDS] The Guide in the Emergency Response Guidebook is for "Chlorosilanes, corrosive, n.o.s." Not TIH in land-based spills, but TiH substance released when spilled in water; [ERG 2016]

Adverse Effects

Toxic Pneumonitis
Yes
Dermatotoxin
Skin burns

Diseases, Processes, and Activities Linked to This Agent

Diseases

Occupational diseases associated with exposure to this agent:

Processes

Industrial Processes with risk of exposure: