Phosphorus pentafluoride
Agent Name
Phosphorus pentafluoride
CAS Number
7647-19-0
Formula
F5-P
Major Category
Toxic Gases & Vapors
Synonyms
Pentafluorophosphorane; Phosphorane, pentafluoro-; Phosphorus fluoride (PF5); Phosphorus, fluoride, penta-; UN2198; [ChemIDplus]
Category
Corrosive Gases
Description
Colorless gas with an unpleasant odor; [HSDB]
Sources/Uses
Used as a catalyst, a fluorinating agent, and a source of phosphorus for ion implantation in semi-conductor manufacturing; [HSDB]
Comments
Corrosive to the skin and eyes; Inhalation may cause pulmonary edema; Liver injury may occur after poisoning by ingestion; [HSDB] Reacts with moisture in air to generate phosphoric acid and hydrogen fluoride; [CAMEO]
Biomedical References
Exposure Assessment
TIH
Yes
TLV (ACGIH)
2.5 mg/m3, as F
PEL (OSHA)
2.5 mg/m3, as F
MAK
1 mg/m3, as F, inhalable fraction
Explanatory Notes
For occupational exposure limits, see "Fluorides."
Adverse Effects
Toxic Pneumonitis
Yes
Hepatotoxin
Hepatoxic (a) from occupational exposure (secondary effect) or (b) in animal studies or in humans after ingestion
Dermatotoxin
Skin burns
Diseases, Processes, and Activities Linked to This Agent
Diseases
Occupational diseases associated with exposure to this agent:
Processes
Industrial Processes with risk of exposure: