Tetramethylsilane

Synonyms

Silane, tetramethyl-; Tetramethyl silane; Silicon, tetramethyl-; Tetramethylsilicane; [ChemIDplus] Silicon tetramethyl; TMS; [Merck Index] Z4MS CVD Precursor; [Air Products MSDS] UN2749

Category

Metalloid Compounds (Silicon)

Description

Liquid; bp = 26.6 deg C; [Merck Index] Colorless odorless liquid; [Air Products MSDS]

Sources/Uses

Used as NMR reference standard, in semiconductor chemical vapor deposition, and for silylation of samples for GC analysis; [Merck Index] Used as an aviation fuel; [CAMEO] Used in semiconductor processing; [Air Products MSDS]

Comments

Pyrophoric; No adverse effects observed in combined subchronic/reproductive/developmental inhalation study of rats at concentrations up to 5,000 ppm/6 hours/day; [HSDB] A mild irritant; Inhalation of vapor may cause nose, throat, and lung irritation and pose an asphyxiation hazard; Harmful by ingestion; [Air Products MSDS] See "Diethylsilane."

Biomedical References

718 mm Hg

may ignite at ambient temp

Other Poison

Simple Asphyxiant

Diseases

Occupational diseases associated with exposure to this agent:

• Asphyxiation, simple

Processes

Industrial Processes with risk of exposure:

• Semiconductor Manufacturing