Trimethylfluorosilane
Agent Name
Trimethylfluorosilane
CAS Number
420-56-4
Formula
C3-H9-F-Si
Major Category
Toxic Gases & Vapors
Synonyms
Fluorotrimethylsilane; Silane, fluorotrimethyl-; [ChemIDplus] Trimethylsilyl fluoride; [Alfa Aesar MSDS] UN3309
Category
Fluorosilanes
Description
Liquefied gas with a pungent irritating odor; [Alfa Aesar MSDS]
Comments
Hydrolyzed by moisture evolving hydrogen fluoride; Causes burns; Inhalation may cause corrosive injuries to the respiratory tract and pulmonary edema; [Alfa Aesar MSDS] See "Methyltrifluorosilane" and "Difluorodimethylsilane."
Biomedical References
Exposure Assessment
TIH
Yes
Explanatory Notes
The Guide in the Emergency Response Guidebook is for "Liquefied gas, toxic, flammable, corrosive, n.o.s."
Adverse Effects
Toxic Pneumonitis
Yes
Dermatotoxin
Skin burns
Diseases, Processes, and Activities Linked to This Agent
Diseases
Occupational diseases associated with exposure to this agent: