Bis(dimethylamino)dimethylsilane
Agent Name
Bis(dimethylamino)dimethylsilane
Synonyms
Silanediamine, hexamethyl-; Silanediamine, N,N,N',N',1,1-hexamethyl-; [ChemIDplus] DIMETHYLBIS(DIMETHYLAMINO)SILANE; [Matheson Tri-Gas MSDS] UN2924
Category
Metalloid Compounds (Silicon)
Description
Clear to straw-colored liquid with an acrid amine odor; [Matheson Tri-Gas MSDS]
Sources/Uses
Used in electronic film deposition; [Matheson Tri-Gas MSDS]
Comments
Reacts with water/moisture producing dimethylamine; Causes burns; Inhalation may cause corrosive injuries to upper respiratory tract; [Matheson Tri-Gas MSDS] See "Bis(dimethylamino)diphenylsilane" and "Bis(dimethylamino)methylvinylsilane."
Explanatory Notes
The Guide in the Emergency Response Guidebook is for "Flammable liquid, corrosive, n.o.s."
Processes
Industrial Processes with risk of exposure: