Ethyl silicate

Synonyms

Tetraethylorthosilicate; Dynasil A; ES 100; ES 28; ES 28 (ester); Ethyl orthosilicate; Ethyl silicate, ((EtO)4Si); Etylu krzemian [Polish]; Orthosilicic acid, tetraethyl ester; Silane, tetraethoxy-; Silicate d'ethyle [French]; Silicate tetraethylique [French]; Silicic acid, tetraethyl ester; Silicon ethoxide; Silicon tetraethoxide; Silikan L; TEOS; TEOS (VAN); Tetraethoxysilane; Tetraethoxysilicon; Tetraethyl orthosilicate; Tetraethyl silicate; Tetraethyl-O-silicate; Tetraethylsilikat [Czech]; [ChemIDplus] UN1292

Category

Metalloid Compounds (Silicon)

Description

Colorless liquid with a sharp, alcohol-like odor; [NIOSH]

Sources/Uses

Used in mortar and surface coatings to improve resistance to weather and chemical corrosion; [ACGIH] Used in the semiconductor/electronics industry; [CSH, p. 402] Used in castings for alloys with high melting points, copper alloys, and dental prosthetic devices; Also used as a source of silicon dioxide by vapor deposition and to produce refractory bricks and heat-resistant paints; [HSDB]

Comments

Rats that survived concentrations of 400 ppm for 7 hours/day for 30 days show liver, kidney, and lung damage. [ACGIH] Causes eye irritation at 250 ppm and tearing at 1,200 ppm; [CSH, p. 402] A skin and respiratory tract irritant; Liquid defats the skin and vapor may depress consciousness; [ICSC] In high-dose animal experiments, it acts as a general anesthetic; [ChemIDplus] See "Methyl silicate."

Biomedical References

Insufficient data

10 ppm

100 ppm

10 ppm

700 ppm

Excerpts from Documentation for IDLHs

Human data: Exposure to a concentration of 1,200 ppm caused lacrimation and 250 ppm caused irritation of the eyes and nose [Smyth and Seaton 1940]. It has been stated that 700 ppm is probably intolerable for more than 30 minutes [Smyth and Seaton 1940].

1.88 mm Hg

3.6 ppm

LCLo (rat) = 1,000 ppm/4H

Explanatory Notes

Detection odor threshold from AIHA (mean = 3.6 ppm); Flash point = 99 deg F; VP from HSDB;

may ignite at ambient temp

25 ppm

100 ppm

300 ppm

Other CNS neurotoxin

Hepatoxic (a) from occupational exposure (secondary effect) or (b) in animal studies or in humans after ingestion

Yes

Processes

Industrial Processes with risk of exposure:

• Semiconductor Manufacturing