Diethylsilane
Agent Name
Diethylsilane
CAS Number
542-91-6
Formula
C4-H12-Si
Major Category
Metals
Synonyms
Silane, diethyl-; [ChemIDplus] UN1993
Category
Metalloid Compounds (Silicon)
Description
Liquid; [Merck Index] Clear colorless liquid; [MSDSonline]
Sources/Uses
Used in semiconductor processing; [MSDSonline]
Comments
An irritant; Highly flammable; "Organic silicon compounds are generally of low toxicity." Acute and chronic toxicity not fully known; [Alfa Aesar MSDS]
Biomedical References
Exposure Assessment
Vapor Pressure
207.52 mm Hg
Explanatory Notes
The Guide in the Emergency Response Guidebook is for "Flammable liquid, n.o.s."
Diseases, Processes, and Activities Linked to This Agent
Processes
Industrial Processes with risk of exposure: