Vinyltrimethylsilane
Agent Name
Vinyltrimethylsilane
CAS Number
754-05-2
Formula
C5-H12-Si
Major Category
Metals
Synonyms
(Trimethylsilyl)ethylene; Silane, ethenyltrimethyl-; Silane, trimethylvinyl- (8CI); Trimethylvinylsilane; [ChemIDplus] TMVS; Ethenyltrimethylsilane; [Air Products MSDS] Trimethyl(vinyl)silane; [Aldrich MSDS] UN1993
Category
Metalloid Compounds (Silicon)
Description
Clear liquid with an unpleasant odor; [Air Products MSDS]
Sources/Uses
Used in semiconductor processing; [Air Products MSDS]
Comments
Flammable; A mild irritant; May decompose to form flammable or explosive mixtures with air; Lethal-dose study of rats at 2,000 mg/kg produced diarrhea on the day of administration and no deaths; Lethal-concentration study of rats at 20,030 mg/m3 (4,886 ppm) caused no clinical signs of toxicity or irritation and no deaths; [Air Products MSDS] May contain up to 3% tetrahydrofuran (with BHT inhibitor) as residual impurity of production; Highly flammable; An irritant; Harmful by ingestion; Targets kidneys, liver, and CNS; [Aldrich MSDS]
Biomedical References
Exposure Assessment
Lethal Concentration
LC50 (rat) > 20,030 mg/m3
Explanatory Notes
The Guide in the Emergency Response Guidebook is for "Flammable liquid, n.o.s."
Diseases, Processes, and Activities Linked to This Agent
Processes
Industrial Processes with risk of exposure: