Tetramethyl ammonium hydroxide
Agent Name
Tetramethyl ammonium hydroxide
CAS Number
75-59-2
Formula
C4-H12-N.H-O
Major Category
Other Classes
Synonyms
Ammonium, tetramethyl-, hydroxide; Hydroxyde de tetramethylammonium [French]; NMD 3; NMW-W; TMAH; Tetramethylammonium hydroxide; Methanaminium, N,N,N-trimethyl-, hydroxide; [ChemIDplus] UN1835
Category
Bases
Description
Colorless liquid with an ammonia-like odor; [CAMEO]
Sources/Uses
In semiconductor manufacturing, TMAH is used to "develop" the pattern in the photoresists; [CHS, p. 44]
Comments
May cause burns and eye damage; At high concentrations, may cause cough, wheezing, and fluid in the lungs; [CSH, p. 405] A very strong base that forms corrosive alkaline solutions; [CHEMINFO-MSDS] A corrosive substance that can cause injury to the skin, eyes, and respiratory tract; [CAMEO]
Biomedical References
Adverse Effects
Toxic Pneumonitis
Yes
Dermatotoxin
Skin burns
Diseases, Processes, and Activities Linked to This Agent
Processes
Industrial Processes with risk of exposure: