Hexamethyldisilazane
Agent Name
Hexamethyldisilazane
CAS Number
999-97-3
Formula
C6-H19-N-Si2
Major Category
Metals
Synonyms
Bis(trimethylsilyl)amine; Disilazane, 1,1,1,3,3,3-hexamethyl-; 1,1,1,3,3,3-Hexamethyldisilazane; HMDS; Silanamine, 1,1,1-trimethyl-N-(trimethylsilyl)-; SZ 6079; Tri-Sil; TSL 8802; [ChemIDplus] UN1993
Category
Metalloid Compounds (Silicon)
Sources/Uses
Used to deactivate chromatography support materials and to promote adhesion of photoresists in the electronics industry; [HSDB]
Comments
Corrosive to skin; [Quick CPC] Reacts with water to release ammonia; Liquid can cause skin burns and eye damage; Vapors can cause respiratory tract irritation and lung damage; [CSH, p. 227] A skin and eye irritant; [CAMEO]
Biomedical References
Exposure Assessment
Vapor Pressure
13.8 mm Hg
Lethal Concentration
LC50 (rat) =8,700 mg/m3/4h
Explanatory Notes
Flash point = 27 deg C; VP from HSDB;
WEEL
10 ppm, STEL = 50 ppm
Adverse Effects
Toxic Pneumonitis
Yes
Dermatotoxin
Skin burns
Diseases, Processes, and Activities Linked to This Agent
Processes
Industrial Processes with risk of exposure: