Trichlorosilane

Synonyms

Silane, trichloro-; Silici-chloroforme [French]; Siliciumchloroform [German]; Silicochloroform; Silicon chloride hydride (SiHCl3); Trichloorsilaan [Dutch]; Trichloromonosilane; Trichlorsilan [German]; Triclorosilano [Italian] [ChemIDplus] UN1295

Category

Chlorosilanes

Description

Colorless fuming liquid with a pungent odor; [ICSC]

Sources/Uses

Used to make silicon for semiconductors; [HSDB] Used to make high-purity silicon and silane adhesion promoters, coupling agents, and silicon resins; [AIHA]

Comments

Reacts with water to release HCl; Corrosive to skin and can produce pneumonitis after inhalation of high concentrations; May ignite on exposure to air; [CSH, p. 418] Highly corrosive to skin; [Quick CPC] A lachrymator; [HSDB] See the Process, "Toxic Gas from Spilling Chemical in Water."

Biomedical References

Yes

Yes

594 mm Hg

LCLo (rat) = 500 ppm/4h

Explanatory Notes

Not TIH in land-based spills, but TiH substance released when spilled in water; [ERG 2016] Flash point = -14 deg C; VP from HSDB;

Reference Link #2

burn readily

1 ppm

3 ppm

25 ppm

Ceiling = 0.5 ppm

Yes

Yes

Skin burns

Diseases

Occupational diseases associated with exposure to this agent:

• Pneumonitis, toxic

Processes

Industrial Processes with risk of exposure:

• Semiconductor Manufacturing
• Toxic Gas from Spilling Chemical in Water