Hexachlorodisilane

Synonyms

Disilane, 1,1,1,2,2,2-hexachloro-; Disilane, hexachloro-; [ChemIDplus] Disilane hexachloride; Disilicon hexachloride; 1,1,1,2,2,2-Hexachlorodisilane; Silicon chloride; [Matheson Tri-Gas MSDS] UN2987

Category

Chlorosilanes

Description

Clear to straw-colored liquid with an acrid odor of hydrogen chloride; [Matheson Tri-Gas MSDS]

Sources/Uses

Used in semiconductor processing; [Matheson Tri-Gas MSDS]

Comments

May form explosive byproducts on prolonged storage; May explode on contact with water; Readily hydrolyzes forming hydrochloric acid; Causes burns; Inhalation may cause corrosive injuries to upper respiratory tract and lungs; [Matheson Tri-Gas MSDS]

Biomedical References

Yes

Yes

Explanatory Notes

Vapor pressure = 12 mm Hg at 40 deg C; [Matheson Tri-Gas MSDS] The Guide in the Emergency Response Guidebook is for "Chlorosilanes, corrosive, n.o.s." Not TIH in land-based spills, but TiH substance released when spilled in water; [ERG 2016]

Yes

Skin burns

Diseases

Occupational diseases associated with exposure to this agent:

• Pneumonitis, toxic

Processes

Industrial Processes with risk of exposure:

• Semiconductor Manufacturing