Silicon tetrafluoride

Agent Name
Silicon tetrafluoride
CAS Number
7783-61-1
Formula
F4-Si
Major Category
Toxic Gases & Vapors
Silicon tetrafluoride formula graphical representation
Synonyms
Perfluorosilane; Silane, tetrafluoro-; Silicon fluoride (SiF4); Tetrafluorosilane; UN1859; [ChemIDplus]
Category
Corrosive Gases
Description
Colorless gas with a pungent odor; [HSDB]
Sources/Uses
Used to manufacture silane, silicon for electronics, and fluosilicic acid; Used as a sealant in oil well drilling; [HSDB]
Comments
On contact with water, may hydrolyze to form fluosilicic acid and silicon dioxide. May be corrosive to the skin, eyes, and respiratory tract; Inhalation may cause pulmonary edema; Chronic exposure may cause fluorosis; [CHEMINFO MSDS] See "Fluorosilic acid." See "FLUORIDES."
Biomedical References

Exposure Assessment

BEI
Fluorides in urine = 2 mg/L prior to shift or 3 mg/L at end of shift; (Repeated measurements recommended.)
TIH
Yes
TLV (ACGIH)
2.5 mg/m3, as F
PEL (OSHA)
2.5 mg/m3, as F
MAK
1 mg/m3, as F, inhalable fraction
Lethal Concentration
LC50 (rat) = 2,272 ppm
Explanatory Notes
For occupational exposure limits, see "Fluorides."
NFPA
will not burn

Adverse Effects

Toxic Pneumonitis
Yes
Dermatotoxin
Skin burns

Diseases, Processes, and Activities Linked to This Agent

Diseases

Occupational diseases associated with exposure to this agent:

Processes

Industrial Processes with risk of exposure: