Bis(dimethylamino)dimethylsilane
Agent Name
Bis(dimethylamino)dimethylsilane
CAS Number
3768-58-9
Formula
C6-H18-N2-Si
Major Category
Metals
Synonyms
Silanediamine, hexamethyl-; Silanediamine, N,N,N',N',1,1-hexamethyl-; [ChemIDplus] DIMETHYLBIS(DIMETHYLAMINO)SILANE; [Matheson Tri-Gas MSDS] UN2924
Category
Metalloid Compounds (Silicon)
Description
Clear to straw-colored liquid with an acrid amine odor; [Matheson Tri-Gas MSDS]
Sources/Uses
Used in electronic film deposition; [Matheson Tri-Gas MSDS]
Comments
Reacts with water/moisture producing dimethylamine; Causes burns; Inhalation may cause corrosive injuries to upper respiratory tract; [Matheson Tri-Gas MSDS] See "Bis(dimethylamino)diphenylsilane" and "Bis(dimethylamino)methylvinylsilane."
Biomedical References
Exposure Assessment
Vapor Pressure
1 mm Hg
Explanatory Notes
The Guide in the Emergency Response Guidebook is for "Flammable liquid, corrosive, n.o.s."
Adverse Effects
Dermatotoxin
Skin burns
Diseases, Processes, and Activities Linked to This Agent
Processes
Industrial Processes with risk of exposure: