Hydrogen fluoride

Agent Name
Hydrogen fluoride
Alternative Name
Hydrofluoric acid
CAS Number
7664-39-3
Formula
F-H
Major Category
Toxic Gases & Vapors
Synonyms
Anhydrous hydrogen fluoride; Aqueous hydrogen fluoride; Hydrofluoric acid; HF-A; [NIOSH] Rubigine; Hydrofluoride; Fluorhydric acid; Antisal 2B; [ChemIDplus] UN1052
Category
Acids, Inorganic
Description
Colorless gas or fuming liquid (below 67 degrees F) with a strong, irritating odor; Note: Shipped in cylinders; [NIOSH]
Sources/Uses
Used as a catalyst and fluorinating agent; used to etch glass, pickle stainless steel, and control pH in oil well operations; [ACGIH] Used as a wet etchant in semiconductor manufacturing at a standard concentration of 49%; [CSH, p. 46]
Comments
Aqueous hydrogen fluoride = hydrofluoric acid; [NIOSH] Industrial solutions of 45% and 53% are sold commercially. [ACGIH] Over-the-counter solutions usually contain 6-12%. Adverse effects caused by different concentrations of solutions include immediate burns after contact with 50% and greater, delayed pain and swelling up to 8 hours after contact with 20-50%, and injury delayed by 12-24 hours after contact with 20% or less. [ATSDR Medical Management] Solutions 30-70% are highly corrosive to skin; [Quick CPC] Listed as one of the "major irritant airborne toxicants"; [LaDou, p. 523] The following chemicals can release HF when spilled in water: Fluorosulfonic acid, Antimony pentafluoride, Iodine pentafluoride, Uranium hexafluoride, Bromine trifluoride, and Bromine pentafluoride. [ERG 2016] See the Process, "Toxic Gas from Spilling Chemical in Water." See the Disease, "Hydrofluoric acid, toxic effect." Hydrogen fluoride is fibrogenic to the lungs in the context of an acute inhalation exposure complicated by bronchiolitis obliterans.
Biomedical References

Exposure Assessment

Skin Designation (ACGIH)
Yes
TIH
Yes
TLV (ACGIH)
0.5 ppm, as F
Ceiling (ACGIH)
2 ppm, as F
PEL (OSHA)
3 ppm, as F
MAK
1 ppm, as F
IDLH (NIOSH)
30 ppm, as F
Excerpts from Documentation for IDLHs
It has been stated that 50 ppm may be fatal when inhaled for 30 to 60 minutes [Deichmann and Gerarde 1969]. Volunteers tolerated concentrations as high as 4.7 ppm for 6 hours per day for 10 to 50 days without severe adverse effects [Largent 1961]
Vapor Pressure
917 mm Hg
Odor Threshold Low
0.04 ppm
Lethal Concentration
LC50 (rat) = 1,276 ppm/1 hr
Explanatory Notes
Odor threshold from AIHA; The Guide from the Emergency Response Guidebook is for " Hydrogen fluoride, anhydrous." The 10-minute ERPGs for HF are: 1: 2 ppm; 2: 50 ppm; and 3: 170 ppm; [AIHA] VP from HSDB;
Reference Link #2
NFPA
will not burn
ERPG-1
2 ppm
ERPG-2
20 ppm
ERPG-3
50 ppm

Adverse Effects

Toxic Pneumonitis
Yes
Fibrogenic
Yes
Dermatotoxin
Skin burns

Diseases, Processes, and Activities Linked to This Agent

Diseases

Occupational diseases associated with exposure to this agent:

Activities

Activities with risk of exposure: