Silicon tetrahydride

Synonyms

Flots 100SCO; Monosilane; Silane; Silicane; Silicon tetrahydride; [ChemIDplus] UN2203

Category

Hydrides

Description

Colorless, flammable and poisonous gas, with a strong repulsive odor; [CAMEO]

Sources/Uses

Used as a source of silicon for semiconductors in the microelectronics industry; [ACGIH]

Comments

Silicon tetrahydride may ignite spontaneously in air. Toxicology data is extremely limited. The TLV is based on the subacute effects in rodents at 1000 ppm. Silane has low acute toxicity in inhalation animal experiments. The estimated LC50 is between 5,000 and 10,000 ppm for 4-hour exposures. [ACGIH] Explosions, fire, and asphyxiation in confined spaces are the most important hazards of silane. [Sullivan, p. 962] A skin, eye, and respiratory tract irritant; Evaporating liquid can cause frostbite; [ICSC]

Biomedical References

Insufficient data

5 ppm

LC50 (rat) = 9,600 ppm/4h

burn readily

Other Poison

Simple Asphyxiant

Diseases

Occupational diseases associated with exposure to this agent:

• Asphyxiation, simple

Processes

Industrial Processes with risk of exposure:

• Semiconductor Manufacturing